The present invention relates to a novel absorbing, photoimageable and aqueous developable positive-working antireflective coating composition comprising a photoacid generator and a polymer comprising at least one unit with an acid labile group and at least one unit with an absorbing chromophore. The invention further relates to a process for using such a composition. The present invention also relates to a novel absorbing, photoimageable and aqueous alkali developable positive-working antireflective coating composition comprising a polymer comprising at least one unit with an acid labile group, a dye and a photoacid generator. The invention further relates to a process for using such a composition. The invention also relates to a novel process for forming a positive image with a positive photoresist and a novel photoimageable and aqueous developable positive-working antireflective coating composition, where the antireflective coating comprises a polymer comprising an acid labile group. The invention further relates to such a composition. The invention also relates to a process for imaging a photoimageable antireflective coating composition.
申请公布号
WO03057678(A8)
申请公布日期
2004.12.29
申请号
WO2003EP00022
申请日期
2003.01.03
申请人
CLARIANT INTERNATIONAL LTD;CLARIANT FINANCE (BVI) LIMITED
发明人
OBERLANDER, JOSEPH, E.;DAMMEL, RALPH, R.;DING-LEE, SHUJI;NEISSER, MARK, O.;TOUKHY, MEDHAT, A.