High-vacuum valve

摘要

A high-vacuum valve arranged to prevent conduction of heat from a valve element (18) to a low-temperature part through a valve shaft (19). After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft, the valve element is pressed against the valve seat to close the valve by pivotal motion of the valve shaft (19). A heater is provided in the valve shaft (19) in close contact with it. Wiring is connected to the heater to supply it with electric power from outside the high-vacuum valve.