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发明名称
Non-destructive inspection method
摘要
申请公布号
EP1202069(B1)
申请公布日期
2004.12.29
申请号
EP20010125239
申请日期
2001.10.24
申请人
NEC ELECTRONICS CORPORATION
发明人
NIKAWA, KIYOSHI
分类号
G01R31/311;(IPC1-7):G01R31/265;H01L21/66
主分类号
G01R31/311
代理机构
代理人
主权项
地址
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