Laser-produced plasma EUV light source with pre-pulse enhancement

摘要

The source (50) has laser sources generating main pulse and pre-pulse laser beams (52, 54), respectively that are timed so that the pre-pulse beam arrives at a target area (56) before the arrival of main pulse beam. A controller (74) sets the timing between the beams to be less than 160 nanoseconds to control the intensity of a radiation. The beams are separated by an angle in the range of 0 to 180 degrees at the target area.