发明名称 |
METHOD AND APPARATUS FOR REDUCTION OF DEFECTS IN WET PROCESSED LAYERS |
摘要 |
The present invention provides a method and apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed electroless deposition solution, and a degassed cleaning solution. The technique includes degassing the process solution before delivering the degassed process solution to a processing unit or degassing the process solution in-situ, within the processing unit. |
申请公布号 |
WO2004097929(A3) |
申请公布日期 |
2004.12.29 |
申请号 |
WO2004GB01739 |
申请日期 |
2004.04.23 |
申请人 |
ASM NUTOOL INC;UZOH CYPRIAN E;BASOL BULENT M |
发明人 |
UZOH CYPRIAN E;BASOL BULENT M |
分类号 |
B24B37/04;B24B57/02;C23C18/16;C25D7/12;C25D21/04;H01L21/288 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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