ANCHORLESS ELECTROSTATICALLY ACTIVATED MICROELECTROMECHANICAL SYSTEM SWITCH INCLUDING SUBSTRATE AND STRESS FREE BEAM DISPOSED ON SUBSTRATE

摘要

PURPOSE: An anchorless electrostatically activated microelectromechanical system switch is provided to manufacture switches through a simple process and allow for multiple throws and poles. CONSTITUTION: An anchorless electrostatically activated microelectromechanical system switch(10) comprises a substrate(12), and a stress free beam(14) disposed on the substrate and provided in a first platform(16) and a second platform(18). The first and second platforms are disposed on the substrate so as to define displacement of stress free beam in a direction which is not substantially parallel to the substrate. One or more control pads(20,24) are disposed in the vicinity of a first vertical side(22) of the stress free beam so as to generate electrical potential on the first vertical side of the stress free beam. The stress free beam is displaceable in a direction substantially parallel to the substrate in accordance with the electrical potential so as to provide a signal path.