发明名称 |
Method of producing sensor element |
摘要 |
The invention relates to an electromechanical drive or a sensor element composed of piezoelectric elements arranged in the form of a stack. The drive or the sensor element is intended for measurement instruments and operates even at very high temperatures.The new drive or the new sensor element (10) for this purpose comprises a number of piezoelectric ceramic layers (12a-f), with electrode layers (16a-e) in each case being arranged between two mutually facing surfaces of directly adjacent piezoelectric ceramic layers. Connectors (18a,b) in the form of wires run in grooves (14a-d) in the electrode layers (16a-e) in order to make electrical contact with the electrode layers (16a-e), and are passed out of the electrode layers (16a-e).
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申请公布号 |
US6834419(B2) |
申请公布日期 |
2004.12.28 |
申请号 |
US20030704162 |
申请日期 |
2003.11.07 |
申请人 |
ENDRESS + HAUSER GMBH + CO. |
发明人 |
LOPATIN SERGEJ;GETMAN IGOR;PANITCH ANATOLIY;WUSEWKER YURIY |
分类号 |
G01F23/296;G01P15/09;H01L41/047;H01L41/08;H01L41/083;H01L41/187;H01L41/22;(IPC1-7):H04R17/00;H01L41/06 |
主分类号 |
G01F23/296 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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