发明名称 Catadioptric objective
摘要 A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a lambda/4 plate arranged between the mirror and the beam splitter. Arranged between the beam splitter and the mount on the side on which false light emerges from the beam splitter is an absorption device that absorbs false light traversing the beam splitter.
申请公布号 US6836379(B2) 申请公布日期 2004.12.28
申请号 US20020117943 申请日期 2002.04.08
申请人 CARL ZEISS SMT AG 发明人 GERHARD MICHAEL;PAUL HANS-JOCHEN
分类号 G02B5/30;G02B1/11;G02B13/24;G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/00 主分类号 G02B5/30
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