| 发明名称 |
Methods and apparatus for processing workpieces |
| 摘要 |
An apparatus that is suitable for processing a workpiece. The apparatus is capable of raising, lowering, and rotating the workpiece as part of at least one of processing the workpiece, loading the workpiece into a process chamber, and unloading the workpiece from the process chamber.
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| 申请公布号 |
US2004255442(A1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
US20030465537 |
申请日期 |
2003.06.19 |
| 申请人 |
MCDIARMID JAMES;MESSINEO DANIEL L. |
发明人 |
MCDIARMID JAMES;MESSINEO DANIEL L. |
| 分类号 |
H01L21/687;(IPC1-7):H01L21/00;H01L21/64 |
主分类号 |
H01L21/687 |
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代理人 |
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