发明名称 |
Cassette for storing a plurality of semiconductor wafers |
摘要 |
A cassette for storing a plurality of semiconductor wafers with a space in the vertical direction has a plurality of support plates which are provided spaced apart from one another in the vertical direction. A receiving cut-out having a shape corresponding to the shape of an adsorber for suction-holding a semiconductor wafer are formed in the front half portion of each of the support plates. The cassette further comprises separation plates between adjacent support plates.
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申请公布号 |
US2004256284(A1) |
申请公布日期 |
2004.12.23 |
申请号 |
US20030469047 |
申请日期 |
2003.08.26 |
申请人 |
NANJO MASATOSHI |
发明人 |
NANJO MASATOSHI |
分类号 |
B65D85/86;H01L21/673;H01L21/68;H01L21/683;(IPC1-7):B65D85/30 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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