发明名称 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
摘要 |
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled. |
申请公布号 |
US2004259476(A1) |
申请公布日期 |
2004.12.23 |
申请号 |
US20040830412 |
申请日期 |
2004.04.21 |
申请人 |
KOROVIN NIKOLAY N.;SCHULTZ STEPHEN C.;HERB JOHN D.;FARMER JAMES L. |
发明人 |
KOROVIN NIKOLAY N.;SCHULTZ STEPHEN C.;HERB JOHN D.;FARMER JAMES L. |
分类号 |
B24B37/00;B24B37/04;B24B41/06;B24B49/16;H01L21/304;(IPC1-7):B24B49/00 |
主分类号 |
B24B37/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|