DIELECTRIC BARRIER DISCHARGE LAMP WITH A BASE

摘要

An elongated dielectric barrier discharge lamp (1) with outer (8a-f) and inner electrodes (23) has a tube (4) that is arranged on the lamp stand end of the discharge vessel and that surrounds said lamp stand. Said tube serves to receive a seal in order to install the lamp in a process chamber in a gastight manner. Power supply of the outer electrodes (8a-f) is separated from the power supply for the inner electrodes (24) coming out of the lamp stand by means of the above-mentioned tube (4). This makes it possible to prevent effectively parasitic discharges between the power supplies which are applied at different potentials during operation also in process chambers under negative pressure.