Evaluation device for evaluating semiconductor device

摘要

An evaluation device for evaluating a semiconductor device, used for evaluating electric characteristics of an electrical connection member provided in a vertical direction to a substrate surface, includes a unit circuit having a switching transistor in which a gate thereof connected to a signal line and one of a source and a drain thereof is connected to a first interconnect, and a first resistance element in which one terminal is connected to the other one of the source and the drain of the switching transistor and the other terminal is connected to a second interconnect. The first resistance element constituting each unit circuit includes at least one electrical connection member.