| 发明名称 |
CRYSTALLIZED FILM AND PROCESS FOR PRODUCTION THEREOF |
| 摘要 |
<p>A process for producing a crystallized film is provided which comprises a step of preparing a film having a crystal grain at a prescribed location, a step of melting a part of a region surrounding the crystal grain of the film and a part of a boundary between the crystal grain and the surrounding film locally by pulse heating, and a step of re-solidifying the melted region.</p> |
| 申请公布号 |
WO2004112110(A1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
WO2004JP08405 |
申请日期 |
2004.06.09 |
| 申请人 |
CANON KABUSHIKI KAISHA;KUMOMI, HIDEYA |
发明人 |
KUMOMI, HIDEYA |
| 分类号 |
C30B13/00;C30B13/22;C30B13/24;H01L21/20;H01L21/336;H01L21/77;H01L29/786;(IPC1-7):H01L21/20 |
主分类号 |
C30B13/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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