发明名称 Removal of metal oxidation
摘要 A method of preparing an oxidized metal surface is disclosed. The oxidized metal is placed in a controlled environment and carbon monoxide is allowed to flow over the oxidized metal while the controlled environment is maintained at temperature level where the metal oxide becomes less stable than carbon dioxide so that the carbon monoxide reacts with the metal oxide to form carbon dioxide, which is removed from the controlled environment.
申请公布号 US2004259375(A1) 申请公布日期 2004.12.23
申请号 US20030463186 申请日期 2003.06.17
申请人 DERDERIAN GARO J. 发明人 DERDERIAN GARO J.
分类号 H01L21/3213;H01L21/768;(IPC1-7):H01L21/302;H01L21/31;H01L21/469 主分类号 H01L21/3213
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