摘要 |
This invention is directed to providing a method for producing a stacked piezoelectric element, where grooves can be easily formed on the side face of a stacked body without causing damage. According to the invention, it is provided that a method for producing a stacked piezoelectric element by alternately stacking a piezoelectric layer and an inner electrode layer, comprising: a green sheet production step of producing a green sheet 110 for base, which constitutes a part of the piezoelectric layer; a unit body formation step of forming a unit body 3 having a narrow stacked part 30 where a narrow piezoelectric material layer 115, which constitutes a part of the piezoelectric layer, having an area smaller than the green sheet 110 for base and an electrode material layer 20, which constitutes the inner electrode layer, having an area smaller than the green sheet 110 for base are stacked, the unit body being formed by disposing the narrow stacked part 30 on the green sheet 110 for base; a stacked body formation step of forming a stacked body having groove parts by stacking a plurality of the unit bodies 3, the groove part having the bottom being defined by the side face of the narrow stacked part 30; and a firing step of firing the stacked body.
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