| 发明名称 |
Fabrication of parallel plate capacitors using BST thin films |
| 摘要 |
A parallel-plate capacitor includes a bottom electrode, a BST thin film dielectric region and a top electrode. The capacitor is processed using various orders of processing steps in order to improve the end result.
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| 申请公布号 |
US2004259316(A1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
US20040822563 |
申请日期 |
2004.04.08 |
| 申请人 |
ACIKEL BAKI;TAYLOR TROY R.;YORK ROBERT A. |
发明人 |
ACIKEL BAKI;TAYLOR TROY R.;YORK ROBERT A. |
| 分类号 |
H01L27/08;(IPC1-7):H01L21/00;H01L21/20 |
主分类号 |
H01L27/08 |
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