发明名称 A METHOD AND AN APPARATUS FOR MANUFACTURING AN ELECTRONIC THIN-FILM COMPONENT AND AN ELECTRONIC THIN-FILM COMPONENT
摘要 <p>The invention relates to a method for manufacturing an electronic thin-film component and an apparatus implementing the method. The invention also relat es to an electronic thin-film component manufactured according to the method. A lowermost, galvanically uniform conductive layer of electrically conductive material is first formed on a substantially dielectric substrate, from which lowermost conductive layer conductive areas are galvanically separated from each other to form an electrode pattern. On top of said electrode pattern it is then possible to form one or several upper passive or active layers required in the thin-film component. According to the invention the separati on of said lowermost conductive layer into an electrode pattern takes place by exerting on the lowermost conductive layer a machining operation based on di e- cut embossing, i.e. embossing, wherein the relief of the machining member us ed in the machining operation causes a permanent deformation on the substrate a nd at the same time embosses areas from the conductive layer into conductive areas galvanically separated from each other. The invention is suitable for manufacturing thin-film components in a roll-to-roll process.</p>
申请公布号 CA2529329(A1) 申请公布日期 2004.12.23
申请号 CA20042529329 申请日期 2004.06.18
申请人 AVANTONE OY 发明人 KORHONEN, RAIMO;KOLOLUOMA, TERHO;TUOMIKOSKI, MARKUS;KOIVUKUNNAS, PEKKA;LAAKKONEN, PASI;KEMPPAINEN, ANTTI
分类号 G03F7/00;B29C59/02;H01L27/32;H01L51/00;H01L51/05;H01L51/30;H01L51/40;H01L51/56 主分类号 G03F7/00
代理机构 代理人
主权项
地址