| 摘要 |
PURPOSE: An apparatus for measuring the charged quantity and an apparatus for measuring the displacement quantity of charged beam are provided to measure the quantity of surface charges of an insulator located in a small space with high resolution irrespective of the material of the insulator. CONSTITUTION: An apparatus for measuring the charged quantity includes two optical systems whose optical axes are approximately perpendicular to each other. Each of the two optical systems includes an electron gun and a camera. The optical system includes the first electron gun, the first observation window(4a) and the first camera(16a). The first electron gun, the first observation window and the first camera are arranged such that the first camera photographs the position at which the first electron beam emitted from the first electron gun is collided with the first electrode(8a). The second optical system includes the second electron gun(6b), a fluorescent substance(14) with which the second electron beam emitted from the second electron gun is collided, the second observation window(4b), and the second camera(16b), which are arranged such that the second camera photographs the collision position of the second electron beam through the second observation window.
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