SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

摘要

[PROBLEMS] The present invention aims to mount a digital circuit and an RF circuit in which an inductor is formed on a same chip. [MEANS FOR SOLVING PROBLEMS] A MOSFET (3) is formed in a region on a silicon substrate (1) which region is isolated by a device isolation film (2). A plurality of low dielectric constant insulator rods (8), in which a low dielectric constant insulating material is respectively buried, are arranged in an RF circuit region (100). The low dielectric constant insulator rods (8) reach the inside of the silicon substrate by penetrating through a first interlayer insulating film (4). An inductor (40) utilizing the multilayer wiring is formed in the interlayer insulating film on the RF circuit region (100). In the magnetic core of the inductor and a region around the core, there is formed a high magnetic permeability isolation region (19) in which a composite material obtained by mixing a high magnetic permeability material and a low dielectric constant material is buried.