OHMIC OR SCHOTTKY ELECTRODE STRUCTURE USING HETERO STRUCTURE OF METAL/SEMICONDUCTOR NANO-ROD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An electrode structure and a manufacturing method thereof are provided to transform a semiconductor nano-rod into an ohmic electrode or a Schottky electrode by depositing a corresponding metal on the nano-rod. CONSTITUTION: An electrode structure includes a predetermined base(10), a plurality of semiconductor nano-rods, and a metal. The plurality of semiconductor nano-rods(12) are grown on the base. The metal(14) is deposited on each nano-rod, so that an electrode structure is completed. The electrode structure presents ohmic or Schottky properties according to the work-function and interfacial characteristics between the nano-rod and the metal.