发明名称 |
Stage base, substrate processing apparatus, and maintenance method for stage |
摘要 |
A stage base comprises a base body, an elevator, and a shifter. The base body has a bottom face facing a reference surface. The elevator is attached to the base body and operative to move the base body in a vertical direction with respect to the reference surface. The shifter is attached to the elevator. The shifter enables the base body to move along the reference surface.
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申请公布号 |
US2004259364(A1) |
申请公布日期 |
2004.12.23 |
申请号 |
US20040866987 |
申请日期 |
2004.06.15 |
申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
TANAKA TOSHIHARU;IIO ITSUSHI;MIYATAKE TSUTOMU |
分类号 |
H01L21/68;G03F7/20;H01J37/20;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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