摘要 |
<p>Workpieces are heated in a sealed, evacuated furnace, to 400-600 [deg] C, especially to 500-550 [deg] C. A gas mixture is introduced, to reach a pressure of 0.1 mbar and 300 mbar. This contains etchants and oxidants in a pure state or as compounds. Plasma is generated in the furnace. 3-120 minutes elapses, especially 5-60 minutes. The workpiece is then removed.</p> |