发明名称 Wafer level packaging technique for microdevices
摘要 <p>A method is disclosed for fabricating a integrated device, such as a MEMS device. A first wafer is provided on an exposed surface with a layer of gold, gold alloy or gold compound. A second wafer is provided on its exposed surface with under-layer of gold, gold alloy or gold compound; and an over- of bismuth, bismuth alloy, a compound of bismuth, cadmium, cadmium alloy, a compound of cadmium compound, tin, tin alloy, or a compound of tin. The wafers are then brought into contact and bonded at their surfaces through the deposited layers. <IMAGE></p>
申请公布号 EP1405821(A3) 申请公布日期 2004.12.22
申请号 EP20030103676 申请日期 2003.10.03
申请人 DALSA SEMICONDUCTOR INC. 发明人 OUELLET, LUC;POISSON, JULES
分类号 B81B7/00;B81C1/00;(IPC1-7):B81B7/00;B81B3/00 主分类号 B81B7/00
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