发明名称 Method for manufacturing semiconductor package
摘要 <p>A method for manufacturing a semiconductor package, the method including the steps of attaching a bottom surface of a semiconductor wafer to a first supporting member, forming a through hole in the semiconductor wafer, separating the semiconductor wafer from the first supporting member, forming an insulating layer on at least the bottom surface of the semiconductor wafer and the inner wall of the through hole, forming a conducting layer underneath the semiconductor wafer, the conducting layer spanning at least the bottom of the through hole; and forming a conductive member in the through hole and in electrical contact with the conducting layer.</p>
申请公布号 EP1489658(A2) 申请公布日期 2004.12.22
申请号 EP20040252447 申请日期 2004.04.28
申请人 SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 KOIZUMI, NAOYUKI;MURAYAMA, KEI;KURIHARA, TAKASHI;HIGASHI, MITSUTOSHI
分类号 H01L23/12;H01L23/48;H01L21/68;H01L21/768;H01L23/32;(IPC1-7):H01L23/48 主分类号 H01L23/12
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