| 摘要 |
PURPOSE:To reduce the size, cost and man-hours of a liquid feed system and to permit the easy maintenance thereof by constituting the system in such a manner that a processing soln. is fed to a processing section via plural liquid feeding pipings by a liquid feeding means. CONSTITUTION:The processing soln. is supplied from a development replenishing tank 61 when judgement is made that a processing soln. tank 6 is empty. A solenoid valve 601 opens in this stage and the replenishing processing soln. is supplied by a pump 604 into the soln. tank 6. A solenoid valve 602 is held closed. The solenoid valve 601 closes and the solenoid valve 602 opens when a sensor detects that the processing soln. in the soln. tank 6 attains a specified volume. The circulation of the processing soln. is then started by the pump 604. The temp. of the processing soln. is controlled by a temp. control tank 605 in this stage. A piece of the pump as the liquid feeding means is thereby omitted and the size, cost and man-hours of the piping system are reduced.
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