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发明名称
Waferrack
摘要
申请公布号
EP1347497(A3)
申请公布日期
2004.12.22
申请号
EP20030004416
申请日期
2003.02.27
申请人
INFINEON TECHNOLOGIES AG
发明人
HOHENWARTER, ERWIN;RAUTER, HENRY
分类号
H01L21/673;(IPC1-7):H01L21/00
主分类号
H01L21/673
代理机构
代理人
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地址
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