Method and apparatus of fabricating flat panel display

摘要

Fabricating a flat panel display device involves coating an etch-resist (33a) on a thin film (32a); forming a soft mold (34) having a groove (34a) and a protrusion (34b) for patterning the thin film; treating an end surface of the protrusion; applying the soft mold to the etch-resist to form an etch-resist pattern (33b); separating the soft mold from the pattern; and etching the thin film by using the pattern to form a thin film pattern (32b). - An INDEPENDENT CLAIM is also included for an apparatus for fabricating the flat panel display device.