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发明名称
摘要
申请公布号	JP3605805(B2)	申请公布日期	2004.12.22
申请号	JP20030005432	申请日期	2003.01.14
申请人		发明人
分类号	B82B3/00;C01B31/02;H01L21/3205;H01L23/52;(IPC1-7):C01B31/02;H01L21/320	主分类号	B82B3/00
代理机构		代理人
主权项
地址

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