发明名称 |
System and method for efficient simulation of reflectometry response from two-dimensional grating structures |
摘要 |
The present invention relates to an efficient method for accurately simulating the integrated reflectometry response from two-dimensional grating structures using a few points. First a first and a second point are determined within an aperture located in an optical system. Next, the reflectance response of light incident at the first point and the second point are simulated. The approximated integrated reflectance response of the aperture is then determined based on the reflectance response at the first point and the second point and the weighted average of the reflectance response at the first point and the second point.
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申请公布号 |
US6833914(B1) |
申请公布日期 |
2004.12.21 |
申请号 |
US20010004495 |
申请日期 |
2001.10.23 |
申请人 |
TIMBRE TECHNOLOGIES, INC. |
发明人 |
BAO JUNWEI;NIU XINHUI;JAKATDAR NICKHIL |
分类号 |
G01N21/47;G01N21/88;G01N21/95;G01N21/956;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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