发明名称 |
Probe assembly for detecting an ion in a plasma generated in an ion source |
摘要 |
A method and apparatus relating to an ion implantation system that employs an ion source for generating a plasma having an ion, and a probe assembly for detecting the ion of the plasma is provided. The probe assembly includes a probe body and a focusing device for extracting the ion from the plasma, and a filter for filtering ions extracted from the plasma.
|
申请公布号 |
US6833710(B2) |
申请公布日期 |
2004.12.21 |
申请号 |
US20010966604 |
申请日期 |
2001.09.27 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
BENVENISTE VICTOR M. |
分类号 |
H01J27/02;H01J37/08;H01J37/32;(IPC1-7):G01N27/62;G01K1/08 |
主分类号 |
H01J27/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|