发明名称 Computer architecture for and method of high-resolution imaging using a low-resolution image transducer
摘要 Architecture and method to transfer data in generation, display or printing high edge placement accuracy images from multiple exposure of plurality of predefined patterns with lower edge placement accuracy. A pattern is laid out on a grid finer or different from grid size of image transducer pixel size, overlaid by transducer grid and converted to n patterns compatible with transducer grid. When combined by partial exposures weighting patterns unevenly, the n patterns generate an image with line edge positions a fraction (1/(2<n>-1)) of transducer grid size. For most picture display and step-and-repeat lithography applications, pattern stored in first memory is displayed or partially exposed once, and remaining patterns are displayed or partially exposed 2<m-1 >times m being copy number of the pattern. Superimposing 2<n>-1 exposures in human eye to scene integration time, picture with improved line placement accuracy is perceived.
申请公布号 US6833908(B2) 申请公布日期 2004.12.21
申请号 US20010816800 申请日期 2001.03.23
申请人 ULTRATECH, INC. 发明人 MARKLE DAVID A.
分类号 G03F7/20;(IPC1-7):G03B27/32;G03B27/42 主分类号 G03F7/20
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