SUBSTRATE TRANSFER APPARATUS REDUCING HOLDING TIME IN POST-PROCESS OF A SUBSTRATE

摘要

PURPOSE: A substrate transfer apparatus is provided to reduce the holding time by changing the pose required for the post-process of the substrate although the pose of the substrate is corrected or changed. CONSTITUTION: A substrate transfer apparatus includes a loading part(2), an inclination part(4) and the controlling part(10). The loading part loads the substrate and moves the substrate to the post-process region slantly. The inclination part is installed on a position corresponding to the transport direction of the loading part(2) performs the surface treatment with moving the substrate slantly. And, the controlling part is connected to the transport rollers to convert the loading substrate to an inclined pose during the movement.