| 摘要 |
FIELD: production of diaphragms out of crystalline aluminum oxide. ^ SUBSTANCE: the invention presents a method of manufacturing of a diaphragm out of crystalline aluminum oxide used in production of microelectronic devices. The method provides for preliminary manufacturing of an aluminum plate corresponding to the form and the sizes of the completed diaphragm. On one of the sides of the plate form a layer predominantly consisting of a crystalline aluminum oxide. Then delete metal aluminum and conduct acid pickling of amorphous components of aluminum oxide in an alkaline solution at the temperature of 40-90 and annealing for final crystallization of the leavings of the amorphous components is conducted in the oxygen-containing medium at the temperature of 700-1200. The invention allows to produce diaphragms, which coefficient of thermal expansion would be equal to a coefficient of thermal expansion of a substrate made out of a massive aluminum oxide, that allows to increase their thermal stability and also to simplify a method of manufacturing of the devices, a part of which is the diaphragm and a capability of automation of production of these devices. ^ EFFECT: production of diaphragms with coefficient of thermal expansion equal to the coefficient of thermal expansion of a substrate made out of a massive aluminum oxide, that allows to introduce automation into production of the devices. ^ 2 cl, 3 dwg, 4 ex |
