ROTATOR FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING SENSORS ON MOTOR AND ROTATING MEMBER AND ROTATION INSPECTING METHOD FOR ROTATOR

摘要

PURPOSE: A rotator for manufacturing a semiconductor device and a rotation inspecting method for the rotator are provided to reduce a detection error of a number of rotation of a motor by implementing sensors both on a motor and a rotating member. CONSTITUTION: A rotator for manufacturing a semiconductor device includes a motor assembly(160), a rotating member, a signal cable(146a,166a), and a measuring member(180). The motor assembly includes a first sensor(166) detecting a rotation of the motor. The rotating member is coupled with the motor assembly and includes a second sensor(146) which is rotated by the operation of the motor to detect the rotation. The signal cable is extended from the second and second sensors to deliver a rotation signal detected by the first and second sensors. The measuring member is coupled with the signal cable, receives the rotation signal to output a number of rotations of the motor assembly and the rotating member.