EXPOSURE METHOD TO ALLOW SUBSTRATE CONTRACTING OR EXPANDING ACCORDING TO TEMPERATURE CHANGE TO BE EXPOSED PROPERLY

摘要

PURPOSE: A method for exposing a plurality of liquid crystal display device substrates having a plurality of alignment keys located in a certain position is provided, to allow a substrate contracting or expanding according to temperature change in an exposure device to be exposed properly. CONSTITUTION: The method comprises the steps of (S11) measuring the position value of a plurality of alignment keys of a plurality of substrates of initial step and exposing it; (S13) calculating the distance of the position value of substrates of initial step measured and its average and storing them; (S17) measuring the position value of some alignment keys selected from the alignment keys of succeeding substrates, calculating the distance between the measured alignment keys, and comparing the distance between the distance of the alignment keys of the succeeding substrates and the distance of the alignment keys of the substrates of initial step to calculate the correction value of the rest; and (S21) exposing it with the reference of the correction value of the rest.