MICRO ACTUATOR USING SHAPE MEMORY ALLOY INCLUDING SUBSTRATE HAVING SPACE SECTION AND SILICON SUBSTRATE FOR COVERING SPACE SECTION

摘要

PURPOSE: A micro actuator using a shape memory alloy is provided to improve operational frequency of a composite thin film by minimizing heat stored in the composite thin film and a peripheral member. CONSTITUTION: A micro actuator includes a substrate(100) having a space section(101) and a vibration plate(130). The vibration plate(130) has a first thin film(110) formed on an upper surface of the substrate(100) so as to cover an upper portion of the space section(101), and a second thin film(120) formed on an upper surface of the first thin film(110). The second thin film(120) is made from a shape memory alloy. The vibration plate(130) is bent toward the space section(101) or in opposition to the space section(101).