SUBSTRATE BAKE APPARATUS FOR REDUCING PROCESSING TIME BY USING SINGLE UNIT FOR PERFORMING HEATING PROCESS AND COOLING PROCESS AND BAKING METHOD THEREOF

摘要

PURPOSE: A substrate bake apparatus and a baking method thereof are provided to reduce a time for transferring a substrate by performing a heating process and a cooling process within a single unit. CONSTITUTION: A substrate gate(112) is formed on one side of a case(110). A cooling unit(120) is installed in the inside of the case. A substrate is loaded on the cooling unit through the substrate gate. A heating unit(130) is installed nearly to the cooling unit. The substrate is loaded on the heating unit. A carrier mechanism(150) is installed between the cooling unit and the heating unit in order to transfer the substrate between the cooling unit and the heating unit.