| 发明名称 |
Probe station for measuring characteristics of silicon wafer, includes chuck for supporting device under test and platen for supporting probe for testing DUT |
| 摘要 |
<p>A chuck (102) supports the device under test (104). An upper platen (106) supports the electrical probes (110) for testing the device under test (DUT). A lower pattern (114) supports the optical probe (116), which are aligned with edge of device under test during testing of DUT.</p> |
| 申请公布号 |
DE20221050(U1) |
申请公布日期 |
2004.12.16 |
| 申请号 |
DE2002221050U |
申请日期 |
2002.12.04 |
| 申请人 |
CASCADE MICROTECH, INC. |
发明人 |
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| 分类号 |
G01R31/28;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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