| 摘要 |
PURPOSE:To enable the exfoliation of a nozzle from a matrix only by a vertical force and thereby to increase a nozzle pattern that can be formed in a unit area of the matrix, by forming a removable exfoliation layer between the nozzle and the matrix and by removing the part of the layer alone selectively. CONSTITUTION:A removable exfoliation layer 2 of Al, Cu or the like is formed as an exfoliation layer on a matrix 1 by using a method of sputtering, ion- plating or the like. Next, an Ni layer is made to grow by means of plating or the like, so as to form the main body of a nozzle 3. Thereafter a reinforcing member 4 is bonded for reinforcement of the nozzle element 3. Lastly, only the removable exfoliation layer 2 is removed by selective etching and exfoliated by pulling up it vertically together with the reinforcing member. |
