| 摘要 |
PROBLEM TO BE SOLVED: To prevent a lid from falling in an SIMF type pod, and to reduce the generation of any particle or the like due to a latch mechanism for fixing the lid to the main body. SOLUTION: The fixing of a lid to the main body is carried out by a pressure reducing space formed between the main body and the lid, and a lid falling preventing member arranged in the lid is engaged with a main body recessed section only when the pressure reducing status of the pressure reducing space is broken down. COPYRIGHT: (C)2005,JPO&NCIPI |
