| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for judging the completion of cleaning by which the completion of cleaning treatment can be judged without repeating experiments and a cleaning apparatus adopting the method for judging the completion of cleaning. SOLUTION: The cleaning apparatus 10 uses a cyclic-use cleaning liquid to remove an adherent sticking to an object to be cleaned, and it is provided with a first sensor 11 that generates a signal indicating the contamination status of the cleaning liquid before the object is cleaned, a second sensor 13 that generates a signal indicating the contamination status of the cleaning liquid after the object is cleaned by using the cleaning liquid, and a completion judging part 20 that obtains a difference between the signals from the first and second sensors, and judges that the cleaning is completed when the obtained difference is smaller than a specified threshold. COPYRIGHT: (C)2005,JPO&NCIPI |
