发明名称 |
SEMICONDUCTOR DEVICE HAVING LOW RESISTANCE AND FABRICATING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which can be fabricated so that it has a relatively low resistance, and a fabricating method for the semiconductor device. SOLUTION: An interface reaction preventing layer is formed between a polycrystalline silicon layer and a metal layer. The interface reaction preventing layer has various functions such as a function of preventing the generation of a substance having a high resistance, which is found in conventional semiconductor device fabricating methods. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2004356610(A) |
申请公布日期 |
2004.12.16 |
申请号 |
JP20030299270 |
申请日期 |
2003.08.22 |
申请人 |
SAMSUNG ELECTRONICS CO LTD |
发明人 |
SAI JIEI;GU JIKIN;LEE SHOGEN;KIM SEIMAN;HEO SEONG-JUN;IN SENHITSU |
分类号 |
H01L21/28;H01L21/283;H01L21/3205;H01L21/336;H01L21/768;H01L23/52;H01L29/423;H01L29/49;H01L29/78;H01L29/786;(IPC1-7):H01L21/28;H01L21/320 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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