发明名称 SEMICONDUCTOR DEVICE HAVING LOW RESISTANCE AND FABRICATING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can be fabricated so that it has a relatively low resistance, and a fabricating method for the semiconductor device. SOLUTION: An interface reaction preventing layer is formed between a polycrystalline silicon layer and a metal layer. The interface reaction preventing layer has various functions such as a function of preventing the generation of a substance having a high resistance, which is found in conventional semiconductor device fabricating methods. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004356610(A) 申请公布日期 2004.12.16
申请号 JP20030299270 申请日期 2003.08.22
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 SAI JIEI;GU JIKIN;LEE SHOGEN;KIM SEIMAN;HEO SEONG-JUN;IN SENHITSU
分类号 H01L21/28;H01L21/283;H01L21/3205;H01L21/336;H01L21/768;H01L23/52;H01L29/423;H01L29/49;H01L29/78;H01L29/786;(IPC1-7):H01L21/28;H01L21/320 主分类号 H01L21/28
代理机构 代理人
主权项
地址