| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the manufacture of a gas type rate sensor having a simplified overall structure, miniaturized, improving the accuracy for coupling a sensor body and a pump, and having proper pump performance and sensor performance. SOLUTION: In the gas type rate sensor, a diaphragm is formed between a lower substrate and an upper substrate and vibrated by an electromagnetic oscillator; a ventilation hole is provided in the base for supporting the diaphragm; an intermediate substrate, on which the sensor bridge of a heat wire is formed, is held; an inlet of the pump; a gas intake and out-take chamber and the outlet of the sensor are formed between the upper substrate and the intermediate substrate; a gas out-take chamber of the pump, the ventilation hole and a nozzle hole for supplying the gas are formed between the lower substrate and the intermediate substrate; and a gas path of the sensor is formed between the lower substrate and the upper substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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