INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method for efficiently detecting vibration within an object under measurement by making contact with a surface of the object under measurement. SOLUTION: This inspection device is equipped with a rotating body 1 rotating in contact with the surface of the object under measurement and a bearing 2 for supporting a rotary shaft of the rotating body 1. A vibration sensor 3 is provided for selectively converting amplitude components of several kHz or less of vibration into electric signals, the vibration occurring in the surface of the object and acquired through the rotating body 1. The vibration sensor 3 is made up of an elastic part piece comprising a leaf spring 31 and a weight 33, and adjusted so that a resonance frequency is several kHz or less, the frequency being determined by the spring constant of the spring and mass. COPYRIGHT: (C)2005,JPO&NCIPI