| 摘要 |
A stage assembly (224) for moving and positioning a device (200) relative to a mounting base (232) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction frame assembly (230). The stage mover assembly (204) moves the stage (206) along an X axis, along a Y axis and about a Z axis. The reaction frame assembly (230) is coupled to the stage mover assembly (204) and reduces the magnitude of the reaction forces created by the stage mover assembly (204) that are transferred to the stage (206) and the mounting base (232). In one embodiment, the reaction frame assembly (230) includes a first mass assembly (256) and a first mass support assembly (258). In this embodiment, the first mass assembly (256) is coupled to the stage mover assembly (204), and the first mass support assembly (258) supports the first mass assembly (256) relative to the mounting base (232) and allows the first mass assembly (256) to move relative to the mounting base (232) along the Z axis. Additionally, the first mass support assembly (258) can include a first mass adjuster (286) that adjusts the position of the first mass assembly (256) relative to the mounting base (232) along the Z axis.
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