DIE HEAD FOR COATING AND COATING APPARATUS AND PRODUCTION METHOD OF DIE HEAD FOR COATING

摘要

PROBLEM TO BE SOLVED: To suppress a membrane thickness defect area and non-uniformity of coating thickness at a start end of coating to be very small and enable to carry out high precision coating which is required at the time of manufacturing a liquid crystal color filter. SOLUTION: In a die head for coating for discharging a coating liquid while moving relative to a substrate and applying the coating liquid to the substrate surface, the die head for coating is so constituted to suppress a membrane thickness defect area at a start end of coating to be very small, to suppress non-uniformity of coating thickness to be very short and to enable to carry out a high precision coating which is required at the time of manufacturing a liquid crystal color filter by applying a mirror plane grinding process on a lip part surface, making the contact angle with the coating liquid on a tip end side surface larger than that of the lip part with the coating liquid. COPYRIGHT: (C)2005,JPO&NCIPI