发明名称 |
Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks |
摘要 |
An apparatus and method for cooling a planar workpiece, such as a substrate of a recording disk, in an evacuated environment has a heat exchanging structure with at least two heat sinks having substantially parallel facing surfaces disposed within a vacuum chamber. A drive arrangement is connected to the heat sinks to controllably and dynamically drive the parallel facing surfaces of the heat sinks towards and away from each other.
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申请公布号 |
US2004250996(A1) |
申请公布日期 |
2004.12.16 |
申请号 |
US20040849848 |
申请日期 |
2004.05.21 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
YI CHANG BOK;TANAKA TATSURU;MCLEOD PAUL |
分类号 |
H01L21/00;(IPC1-7):F28F5/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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