OSCILLATING MIRROR HAVING A PLURALITY OF EIGENMODES

摘要

Oscillating mirror system (200) including a plurality of masses (202, 204, 210, 206, 208), at least one force producing element (218), and a plurality of elastic elements (212), each of the force producing elements (218) being coupled with a respective one of the masses, at least one of the masses (210) including a mirror (210), each of the force producing elements (218) applying a force to the masses, the elastic elements (212) coupling the masses (202, 204, 210, 206, 208) together, the elastic elements (212) coupling the masses with a respective support (214, 216), wherein the mass values of the masses, the force values of the forces, and the stiffness coefficients of the elastic elements, are selected such that the mirror periodically according to the eigenfrequencies of the oscillating mirror system (200).