| 摘要 |
PROBLEM TO BE SOLVED: To solve problems wherein the possibility of occurrence of a falling-off accident of a piezoelectric diaphragm gets higher owing to an external force exerted to the piezoelectric diaphragm, because connection electrodes are shaped small on the piezoelectric diaphragm as a piezoelectric vibrator reaches a high level of downsizing; the number of bumps to be arranged in a forming area of the connection electrodes is decreased thereby; the bonding strength between electrode pads and the connection electrodes gets lower resulting in causing improper conduction in the worst case; and because the small number of the bumps results in lowering the strength of supporting the piezoelectric diaphragm. SOLUTION: The piezoelectric diaphragm is characterized in that a recessed part is formed in a region on a principal face of a piezoelectric raw plate, in the piezoelectric diaphragm being configured such that opposed exciting electrodes, lead electrodes extended from the exciting electrodes, and connection electrodes electrically connected to the lead electrodes and taking the continuity to a package, are formed on the principal face of the piezoelectric raw plate, and that bumps are used to take continuity between the connection electrodes and the electrode pads formed to the package and to keep the supporting attitude of the piezoelectric raw plate. COPYRIGHT: (C)2005,JPO&NCIPI
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